Nanostructured ceramics synthesized by chemical vapor condensation

A modification of the conventional inert gas condensation apparatus for making nanostructured powders, wherein an evaporative source is replaced by a chemical source, is described. This process has been used to synthesize loosely agglomerated amorphous nanoparticles of n-SiCxNyOz, starting from hexamethyldisilazane (HMDS) as precursor compound. The density, surface area, particle size, and composition of as-synthesized n-SiCxNyOz powders can be modified by changing the synthesis temperature and carrier gas. The phase and morphology of as-synthesized powders can also be modified by heat treatment.