ION ETCHING OF AMORPHOUS AND SEMICRYSTALLINE FIBERS

被引:26
作者
WARNER, SB
UHLMANN, DR
PEEBLES, LH
机构
[1] MIT,CTR MAT SCI & ENGN,DEPT MET & MAT SCI,CAMBRIDGE,MA 02139
[2] OFF NAVAL RES,BOSTON,MA
[3] MIT,DEPT CHEM ENGN,CAMBRIDGE,MA
关键词
D O I
10.1007/BF01163070
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:758 / 764
页数:7
相关论文
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