CHEMICAL SPUTTERING OF GRAPHITE IN AN OXYGEN PLASMA

被引：45

作者：

HOLLAND, L ^{[1
]}

OJHA, SM ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON,ENGLAND

来源：

关键词：

D O I：

10.1016/S0042-207X(76)80624-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：53 / 60

页数：8

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HOLLAND, L .

HOLLAND, L ;

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[9]

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[10]

MCTAGGART FK, 1967, PLASMA CHEMISTRY ELE