AUGER AND X-RAY CHARACTERIZATION OF SURFACE NITRIDE FILMS ON TI, ZR, AND HF

被引：17

作者：

DAWSON, PT ^{[1
]}

STAZYK, SAJ ^{[1
]}

机构：

[1] MCMASTER UNIV,DEPT CHEM,HAMILTON L8S 4M1,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 01期

关键词：

D O I：

10.1116/1.571732

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：36 / 41

页数：6

共 11 条

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[8]

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[9] UNTERSUCHUNGEN IN DEN SYSTEMEN - HAFNIUM-BOR-STICKSTOFF UND ZIRKONIUM-BOR-STICKSTOFF [J].

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