MASS-TRANSFER ANALYSES OF THE PLASMA DEPOSITION PROCESS

被引：26

作者：

CHEN, I

机构：

来源：

THIN SOLID FILMS | 1983年 / 101卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90491-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：41 / 53

页数：13

共 17 条

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