OPTIMIZED BINARY, PHASE-ONLY, DIFFRACTIVE OPTICAL-ELEMENT WITH SUBWAVELENGTH FEATURES FOR 1.55 MU-M

被引：68

作者：

ZHOU, ZP

DRABIK, TJ

机构：

[1] School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1995年 / 12卷 / 05期

关键词：

D O I：

10.1364/JOSAA.12.001104

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report the use of rigorous coupled-wave diffraction analysis in conjunction with the simulated annealing optimization method for performing optimal design of binary-level surface-relief diffractive elements with subwavelength, submicrometer features that exhibit quasi-linear-phase transmittance. An element designed for operation at 1.55 mu m has been fabricated and is characterized.

引用

页码：1104 / 1112

页数：9

共 12 条

[1]

BABIN S, 1993, P SOC PHOTO-OPT INS, V1751, P202, DOI 10.1117/12.138882

[2] PLANAR DIELECTRIC GRATING DIFFRACTION THEORIES [J].