DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS

被引：181

作者：

CAMPBELL, CT

VALONE, SM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.573230

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：408 / 411

页数：4

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共 7 条

[1] VELOCITY DISTRIBUTION AND ANGULAR-DISTRIBUTION OF MOLECULAR-BEAMS FROM MULTICHANNEL ARRAYS
BEIJERINCK, HCW
VERSTER, NF
[J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 2083 - 2091
[2] THE EFFECTS OF CARBON, OXYGEN, SULFUR AND POTASSIUM ADLAYERS ON CO AND H-2 ADSORPTION ON FE(100)
BENZIGER, J
MADIX, RJ
[J]. SURFACE SCIENCE, 1980, 94 (01) : 119 - 153
[3] THE INTERACTIONS OF O2, CO AND CO2 WITH AG(110)
CAMPBELL, CT
PAFFETT, MT
[J]. SURFACE SCIENCE, 1984, 143 (2-3) : 517 - 535
[4] CAMPBELL CT, SURF SCI
[5] Dushman S., 1962, SCI FDN VACUUM TECHN, P94
[6] MOLECULAR BEAM FORMATION BY LONG PARALLEL TUBES
GIORDMAINE, JA
WANG, TC
[J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (03) : 463 - 471
[7] MOLECULAR-BEAM SOURCES FABRICATED FROM MULTICHANNEL ARRAYS .I. ANGULAR DISTRIBUTIONS AND PEAKING FACTORS
JONES, RH
OLANDER, DR
KRUGER, VR
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) : 4641 - &