A COMPARISON OF EXPERIMENTAL AND THEORETICAL ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN A MULTICUSP ION-SOURCE

被引：12

作者：

BRETAGNE, J

GRAHAM, WG

HOPKINS, MB

机构：

[1] QUEENS UNIV BELFAST,DEPT PHYS,BELFAST BT7 1NN,ANTRIM,NORTH IRELAND

[2] UNIV PARIS 11,F-91405 ORSAY,FRANCE

[3] DUBLIN CITY UNIV,DEPT PHYS,DUBLIN,IRELAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1991年 / 24卷 / 05期

关键词：

D O I：

10.1088/0022-3727/24/5/005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Experimental and theoretical electron energy distribution functions (EEDFS) measured in and calculated for the driver of a multicusp ion source operating in hydrogen are compared. The results show that atomic physics based theoretical models can accurately predict the EEDF in such discharges if some appropriate experimentally determined quantities are used as input parameters. The magnitude and shape of the EEDF is found to be particularly sensitive to the effective surface area to volume ratio for electrons.

引用

收藏

页码：668 / 671

页数：4

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