SURFACE CHARACTERIZATION OF CLEAN POLYIMIDE FILMS BY HIGH-RESOLUTION ELECTRON ENERGY-LOSS SPECTROSCOPY

被引：26

作者：

PIREAUX, JJ ^{[1
]}

GREGOIRE, C ^{[1
]}

THIRY, PA ^{[1
]}

CAUDANO, R ^{[1
]}

CLARKE, TC ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574681

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：598 / 602

页数：5

共 17 条

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[9]

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