INSITU OBSERVATION OF DAMAGE EVOLUTION IN SIC CRYSTALS DURING HE+ AND H-2+ DUAL-ION BEAM IRRADIATION

Using the new system of in-situ observation during dual-ion beam irradiation recently developed al JAERI, effects of simultaneous 12 keV He- and 15 keV H-2+ ion irradiation at room temperature on the formation of bubbles in SiC crystals were examined. It was found that hydrogen atoms gave quite a different effect on the formation of helium bubbles according to whether they were pre-injected or simultaneously injected with the helium atoms. Bubble formation is enhanced by pre-injection of hydrogen atoms, whereas it is little influenced by simultaneous injection of hydrogen atoms and helium atoms.