PHOTODISPLACEMENT MEASUREMENT BY INTERFEROMETRIC LASER PROBE

被引：28

作者：

TAKAMATSU, H ^{[1
]}

NISHIMOTO, Y ^{[1
]}

NAKAI, Y ^{[1
]}

机构：

[1] LEO CORP,TARUMI KU,KOBE 658,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 12期

关键词：

PHOTOACOUSTIC EFFECT; PHOTODISPLACEMENT; LASER PROBE; INTERFEROMETER; SUBSURFACE IMAGING; THICKNESS MEASUREMENT; NONCONTACT DETECTION; THERMAL IMAGING;

D O I：

10.1143/JJAP.29.2847

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A highly sensitive optical heterodyne interferometer was developed for the purpose of measuring the photodisplacement of a sample induced by the absorption of modulated light. The sensitivity is 1 pm in the 1 Hz bandwidth, sufficient to measure the photodisplacement. A good correlation was obtained between the amplitude of the photodisplacement and the subsurface structures of aluminum thin-film samples. The experimental results revealed that this technique is applicable to thickness measurement and to imaging of subsurface structures for opaque thin films.

引用

页码：2847 / 2850

页数：4

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