SYNTHESIS AND CHARACTERIZATION OF SI3N4 POWDER PRODUCED BY LASER-INDUCED CHEMICAL-REACTION

被引：42

作者：

KIZAKI, Y

KANDORI, T

FUJITANI, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 07期

关键词：

D O I：

10.1143/JJAP.24.800

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：800 / 805

页数：6

共 9 条

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[3] INFRARED-LASER PHOTOCHEMISTRY OF SILANE [J].

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[4]

GAZZARA CP, 1977, CERAM B, V56, P778

[5]

HAGGERTY JS, 1981, LASER INDUCED CHEM P, pCH3

[6]

HAGGERTY JS, MITEL78037 EN LAB RE

[7] SYNTHESIS, CHARACTERIZATION, AND CONSOLIDATION OF SI3N4 OBTAINED FROM AMMONOLYSIS OF SICL4 [J].

MAZDIYASNI, KS ;

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JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (12) :628-633

[8]

PROCHAZKA S, 1978, AM CERAM SOC BULL, V57, P579

[9]

SAWHILL HT, 1982, COMM AM CERAM SOC, pC131

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