NOVEL DESIGN FOR A COMPACT FIBEROPTIC SCANNING FORCE MICROSCOPE

被引：6

作者：

BINGGELI, M ^{[1
]}

KOTROTSIOS, G ^{[1
]}

CHRISTOPH, R ^{[1
]}

HINTERMANN, HE ^{[1
]}

BERGHAUS, T ^{[1
]}

GUTHNER, P ^{[1
]}

机构：

[1] OMICRON VAKUUMPHYS GMBH,W-6204 TAUNUSSTEIN 4,GERMANY

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 10期

关键词：

D O I：

10.1063/1.1144477

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a new scanning force microscope (SFM) design with a compact fiber-optic interferometric detection system that provides very high resolution for surface force measurements. The mechanical conception of the instrument includes the implementation of piezoelectric actuators for the interferometer alignment. The result of this approach is a high performance SFM with both easy handling and high versatility.

引用

收藏

页码：2888 / 2891

页数：4

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