ION POLISHING OF COPPER - SOME OBSERVATIONS

被引：12

作者：

HOFFMAN, RA ^{[1
]}

LANGE, WJ ^{[1
]}

CHOYKE, WJ ^{[1
]}

机构：

[1] WESTINGHOUSE ELECT CORP,RES LABS,PITTSBURGH,PA 15235

来源：

APPLIED OPTICS | 1975年 / 14卷 / 08期

关键词：

D O I：

10.1364/AO.14.001803

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1803 / 1807

页数：5

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