MANUFACTURING TECHNOLOGY PROGRAM TO DEVELOP A PRODUCTION ION-IMPLANTATION FACILITY FOR PROCESSING BEARINGS AND TOOLS

被引：32

作者：

SMIDT, FA

SARTWELL, BD

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90612-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：70 / 77

页数：8

共 11 条

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[2]

CHAN WK, 1982, CORROSION METALS PRO, P91

[3]

CHARTER SJB, 1981, THIN SOLID FILMS, V84, P335

[4]

DAVISSON C, 1984, UNPUB

[5]

Grabowski K. S., 1983, Ion Implantation: Equipment and Techniques. Proceedings of the Fourth International Conference, P364

[6]

GRABOWSKI KS, ION IMPLANTATION ION

[7]

Kant R. A., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P253

[8]

MANNING I, 1984, UNPUB

[9]

POPGOSHEV D, 1983, ASME J LUB TECHNOL, V105, P534

SINGER, IL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :419-422