SPECTROSCOPIC STUDY OF A HIGH-FREQUENCY, INDUCTIVELY-COUPLED AR-H2S PLASMA

被引：33

作者：

JAROSZ, J ^{[1
]}

MERMET, JM ^{[1
]}

机构：

[1] INST NATL SCI APPL LYON,CHIM IND & ANAL LAB,F-69621 VILLEURBANNE,FRANCE

来源：

关键词：

D O I：

10.1016/0022-4073(77)90162-5

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：237 / 246

页数：10

共 27 条

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