A NEW METHOD FOR THE DISTANCE CONTROL OF A SCANNING KELVIN MICROSCOPE

被引：13

作者：

BAUMGARTNER, H

机构：

[1] Inst. fur Phys., Univ. der Bundeswehr Munchen, Neubiberg

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1992年 / 3卷 / 02期

关键词：

D O I：

10.1088/0957-0233/3/2/017

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new technique to control the distance between the vibrating Kelvin probe and a sample is described. The main principle of operation relies on the use of the harmonics of the measured displacement current. By a simple signal processing, it is possible to simultaneously monitor, with a high lateral resolution, the topography and the contact potential difference.

引用

页码：237 / 238

页数：2

共 7 条

[1] MICRO KELVIN PROBE FOR LOCAL WORK-FUNCTION MEASUREMENTS [J].