ANGLE MEASUREMENT BASED ON THE INTERNAL-REFLECTION EFFECT - A NEW METHOD

被引:149
作者
HUANG, PS [1 ]
KIYONO, S [1 ]
KAMADA, O [1 ]
机构
[1] TOHOKU UNIV,FAC ENGN,DEPT PRECIS ENGN,SENDAI,MIYAGI 980,JAPAN
来源
APPLIED OPTICS | 1992年 / 31卷 / 28期
关键词
ANGLE MEASUREMENT; INTERNAL REFLECTION; CRITICAL ANGLE PRISM;
D O I
10.1364/AO.31.006047
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We describe a new method of angle measurement that is based on the internal-reflection effect at an air-glass boundary. The method uses a differential detection scheme to largely reduce the inherent nonlinearity of the reflectance versus the angle of incidence in internal reflection. With nonlinearity reduced, the displacement of the angle of incidence can be determined accurately by measuring the reflectance. The resolution and measurement range are determined by the initial angle of incidence, the polarization state of the light, and the number of reflections. Compared with interferometers and autocollimators, this method has the advantage of a simple sensor design for applications ranging from a wide measurement range to extremely high resolution. Other advantages are compact size, simple structure, and low cost. A theoretical analysis of the method and some experimental results of a prototype sensor are presented. The possible applications of the method are also discussed.
引用
收藏
页码:6047 / 6055
页数:9
相关论文
共 11 条
[1]   INTERFEROMETRIC ANGULAR MEASUREMENT [J].
CHAPMAN, GD .
APPLIED OPTICS, 1974, 13 (07) :1646-1651
[2]  
ENNOS AE, 1982, J PREC ENG, V4, P5
[3]  
HECHT E, 1989, OPTICS, P100
[4]   INTERFEROMETRIC MEASUREMENT OF ANGLES [J].
MALACARA, D ;
HARRIS, O .
APPLIED OPTICS, 1970, 9 (07) :1630-&
[5]  
NI J, IN PRESS ASME
[6]  
QUENELLE RC, 1983, NEW MICROCOMPUTER CO, P3
[7]   AN INTERFEROMETER FOR PRECISION ANGLE MEASUREMENTS [J].
ROHLIN, J .
APPLIED OPTICS, 1963, 2 (07) :762-763
[8]   HIGH-PRECISION, WIDE-RANGE, DUAL-AXIS, ANGLE MONITORING-SYSTEM [J].
SCHUDA, FJ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (12) :1648-1652
[9]   NEW OPTICAL METHOD FOR MEASURING SMALL-ANGLE ROTATIONS [J].
SHI, P ;
STIJNS, E .
APPLIED OPTICS, 1988, 27 (20) :4342-4344
[10]   BASIC INVESTIGATIONS ON AN ANGLE MEASUREMENT SYSTEM USING A LASER [J].
TAKANO, T ;
YONEHARA, S .
IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS, 1990, 26 (04) :657-662