1.3-MU-M WAVELENGTH, INGAASP-INP FOLDED-CAVITY SURFACE-EMITTING LASERS GROWN BY GAS-SOURCE MOLECULAR-BEAM EPITAXY

被引:11
作者
CHAO, CP
SHIAU, GJ
FORREST, SR
机构
[1] Advanced Technology Center for Photonics and Optoelectronic Materials, Department of Electrical Engineering, Princeton University, Princeton., NJ
[2] Advanced Technology Center for Photonics and Optoelectronic Materials, Department of Electrical Engineering, Princeton University, Princeton, NJ
[3] Department of Materials Science, University of Southern California, Los Angeles
关键词
D O I
10.1109/68.392229
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A 1.3-mu m wavelength, strained multiple quantum well InGaAsP-InP folded-cavity surface-emitting laser was fabricated using CH4:H-2 reactive ion etching to form the 45 degrees angled vertical output facet. A pulsed threshold current of 45 mA and a 20% efficiency for the surface-emitted light were achieved for 550 mu m-long hv 5 mu m-wide devices, The threshold current is the lowest reported for folded-cavity surface-emitting lasers operating at this wavelength, making the devices suitable for many optoelectronic smart pixel and interconnection applications. To our knowledge, this is the first demonstration of an InP-based folded-cavity structure using CH4:H-2 reactive ion etching.
引用
收藏
页码:1406 / 1408
页数:3
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