DECONVOLUTION OF THE IMPEDANCE OF THE SILICON ELECTROLYTE INTERFACE BY POTENTIAL-MODULATED-MICROWAVE MEASUREMENTS

A novel method, based on the measurement of potential-modulated microwave reflectivity changes, is proposed for the deconvolution of the impedance of the semiconductor/electrolyte interface. Experimental results for the silicon/aqueous fluoride system show that this method can be used to separate space-charge and surface-capacitance contributions. It is shown that the pH dependence of the flatband potential of n-Si(111) in fluoride solutions is Nemstian from pH 1.2 to 13.