ION DOSE DETERMINATION USING BEAM CHOPPER TECHNIQUES

被引：9

作者：

PIEL, N ^{[1
]}

BERHEIDE, M ^{[1
]}

POLACZYK, C ^{[1
]}

ROLFS, C ^{[1
]}

SCHULTE, WH ^{[1
]}

机构：

[1] RUHR UNIV BOCHUM,INST PHYS IONENSTRAHLEN,BOCHUM,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1994年 / 349卷 / 01期

关键词：

D O I：

10.1016/0168-9002(94)90603-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The determination of ion beam doses using a beam chopper was investigated over a wide range of experimental parameters simulating the conditions for material analyses. The investigations were carried out using the collected charge on the wings of the beam chopper as well as the observed RBS yield from a thin gold layer on the surface of the wings. Both techniques determine the ion dose with a precision of the order of 1% and complement each other under extreme conditions such as high/low ion beam currents (pA to mu A) or short running times (few seconds). The techniques are independent from the setup of the sample as well as from the ion beam position on the sample. An optimized experimental setup in UHV technology is discussed.

引用

页码：18 / 26

页数：9

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