SULFUR-DOPED INDIUM OXIDE THIN-FILMS AS A NEW TRANSPARENT AND CONDUCTIVE LAYER PREPARED BY OMCVD PROCESS USING BUTYLINDIUM THIOLATE

被引:28
作者
NOMURA, R
KONISHI, K
MATSUDA, H
机构
[1] Department of Applied Chemistry, Faculty of Engineering, Osaka University, Yamada-Oka, Suita
关键词
D O I
10.1149/1.2085646
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
[No abstract available]
引用
收藏
页码:631 / 632
页数:2
相关论文
共 6 条
[1]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[2]   EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].
HAMBERG, I ;
GRANQVIST, CG .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159
[3]   PREPARATION AND CHARACTERIZATION OF NORMAL-BUTYLINDIUM AND ISO-BUTYLINDIUM THIOLATE [J].
NOMURA, R ;
INAZAWA, S ;
KANAYA, K ;
MATSUDA, H .
POLYHEDRON, 1989, 8 (06) :763-767
[4]   PREPARATION OF TRANSPARENT AND CONDUCTING INDIUM OXIDE-FILMS BY SOLUTION PYROLYSIS OF DIBUTYLINDIUM THIOLATE [J].
NOMURA, R ;
MORITAKE, A ;
KANAYA, K ;
MATSUDA, H .
THIN SOLID FILMS, 1988, 167 (1-2) :L27-L29
[5]  
NOMURA R, IN PRESS THIN SOLID
[6]   Thermal decomposition of butylindium thiolates and preparation of indium sulfide powders [J].
Nomura, Ryoki ;
Inazawa, Shin'ji ;
Kanaya, Kouichi ;
Matsuda, Haruo .
APPLIED ORGANOMETALLIC CHEMISTRY, 1989, 3 (02) :195-197