ELECTRON-SPECTROSCOPY STUDY OF SIC

被引：55

作者：

BOZSO, F

MUEHLHOFF, L

TRENARY, M

CHOYKE, WJ

YATES, JT

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 03期

关键词：

D O I：

10.1116/1.572394

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1271 / 1274

页数：4

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