COMPARISONS OF GLOW-DISCHARGE POLYMERIZATION BETWEEN HEXAMETHYLDISILAZANE AND TRIMETHYLSILYLDIMETHYLAMINE

被引:12
作者
INAGAKI, N
KISHI, A
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关键词
D O I
10.1002/pol.1983.170210819
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
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页码:2335 / 2343
页数:9
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