THE SCANNING TUNNELING MICROSCOPE AS A MEANS FOR THE INVESTIGATION OF ION-BOMBARDMENT EFFECTS ON METAL-SURFACES

被引：84

作者：

MICHELY, T

COMSA, G

机构：

[1] Institut für Grenzflächenforschung und Vakuumphysik, KFA Forschungszentrum Jülich, 5170 Jülich

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 82卷 / 02期

关键词：

D O I：

10.1016/0168-583X(93)96023-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The scanning tunneling microscopy (STM) is used to investigate the surface morphology of Pt(Ill) after 600 eV Ar+ ion bombardment in dependence on ion dose and temperature during sputtering. The surface morphological evolution during sputtering in the pit formation and in the layer-by-layer removal regime is monitored by STM. Two new types of structures produced during Ar+ sputtering (target adatom islands and subatomic height bumps) and uncovered by STM measurements are presented and their creation mechanisms discussed. Finally a new STM-based method of yield determination is proposed. The range of applicability of the method is analysed and the morphology dependence of the sputtering yield is investigated.

引用

页码：207 / 219

页数：13

共 38 条

[1] Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145
[2] BEHM RJ, 1990, SCANNING TUNNELING M
[3] AN EASILY OPERABLE SCANNING TUNNELING MICROSCOPE
BESOCKE, K
[J]. SURFACE SCIENCE, 1987, 181 (1-2) : 145 - 153
[4] LOW PRIMARY ION FLUENCE DEPENDENCE OF SINGLE-CRYSTAL SPUTTERING - A MOLECULAR-DYNAMICS STUDY
BETZ, G
PELLIN, MJ
BURNETT, JW
GRUEN, DM
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 58 (3-4) : 429 - 437
[5] TUNNELING THROUGH A CONTROLLABLE VACUUM GAP
BINNIG, G
ROHRER, H
GERBER, C
WEIBEL, E
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 178 - 180
[6] SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY
BINNING, G
ROHRER, H
GERBER, C
WEIBEL, E
[J]. PHYSICAL REVIEW LETTERS, 1982, 49 (01) : 57 - 61
[7] ION-DOSE DEPENDENCE OF THE SPUTTERING YIELD OF RU(0001) AT VERY LOW FLUENCES
BURNETT, JW
PELLIN, MJ
CALAWAY, WF
GRUEN, DM
YATES, JT
[J]. PHYSICAL REVIEW LETTERS, 1989, 63 (05) : 562 - 565
[8] EFFECTS OF ION MASS AND ENERGY ON THE DAMAGE INDUCED BY AN ION-BEAM ON GRAPHITE SURFACES - A SCANNING TUNNELING MICROSCOPY STUDY
CORATGER, R
CLAVERIE, A
CHAHBOUN, A
LANDRY, V
AJUSTRON, F
BEAUVILLAIN, J
[J]. SURFACE SCIENCE, 1992, 262 (1-2) : 208 - 218
[9] SCANNING TUNNELING MICROSCOPY OF DEFECTS INDUCED BY CARBON BOMBARDMENT ON GRAPHITE SURFACES
CORATGER, R
CLAVERIE, A
AJUSTRON, F
BEAUVILLAIN, J
[J]. SURFACE SCIENCE, 1990, 227 (1-2) : 7 - 14
[10] DONNELLY W, 1978, VACUUM, V28, P163

← 1 2 3 4 →