PROFILOMETRY BY PHASE-SHIFTED TALBOT IMAGES

被引：38

作者：

OREB, BF

DORSCH, RG

机构：

[1] Division of Applied Optics, Commonwealth Scientific and Industrial Research Organisation, Sydney, 2070, P.O. Box 218, Lindfield

[2] Dorsch is on sabbatical from the Physikalisches Institut, Universität Erlangen-Nurnberg, Erlangen, D-8520

来源：

APPLIED OPTICS | 1994年 / 33卷 / 34期

关键词：

PROFILOMETRY; TALBOT SELF-IMAGING; RELIEF MEASUREMENT; PHASE SHIFTING;

D O I：

10.1364/AO.33.007955

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We introduce a profilometry sensor that combines phase shifting with a Talbot self-image of a sinusoidal grating as the illumination part of the sensor. Contrast of the Talbot diffraction pattern produced with a sinusoidal grating in a diverging beam is theoretically discussed and verified experimentally. The mathematical relationship that is used to convert the phase measured with this sensor to the corresponding relief of an object is derived in the Appendix. A ceramic former used in the production of lenses was profiled with this sensor, and measurement results are presented.

引用

页码：7955 / 7962

页数：8

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