SUPPRESSION OF THERMOCAPILLARY WAVES IN LASER MELTING OF METALS AND SEMICONDUCTORS

被引:33
作者
TOKAREV, VN
KONOV, VI
机构
[1] General Physics Institute of the Russian Academy of Science, 117942 Moscow, CIS
关键词
D O I
10.1063/1.357752
中图分类号
O59 [应用物理学];
学科分类号
摘要
A theoretical study of surface relief stability in the laser melting of materials with relatively high thermal diffusivity and/or relatively high absorption coefficient (mainly metals and semiconductors) is given. Irradiation regimes are found where it is possible to avoid the development of surface wavy relief of the nonresonant type (with periodicities much greater then the radiation wavelength) both for cw and pulsed irradiation. The results obtained can have important consequences for the improvement of the quality of laser materials processing, e.g., in laser applications for microelectronics, or in laser modification of a surface.
引用
收藏
页码:800 / 805
页数:6
相关论文
共 30 条
[1]   THE ACTION OF POWERFUL LASER-RADIATION ON SURFACES OF SEMICONDUCTORS AND METALS - NONLINEAR OPTICAL EFFECTS AND NONLINEAR OPTICAL DIAGNOSTICS [J].
AKHMANOV, SA ;
EMELYANOV, VI ;
KOROTEYEV, NI ;
SEMINOGOV, VN .
USPEKHI FIZICHESKIKH NAUK, 1985, 147 (04) :675-745
[2]  
ANISIMOV SI, 1980, ZH EKSP TEOR FIZ+, V78, P1597
[3]   SURFACE RIPPLING INDUCED BY SURFACE-TENSION GRADIENTS DURING LASER SURFACE MELTING AND ALLOYING [J].
ANTHONY, TR ;
CLINE, HE .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) :3888-3894
[4]   MORPHOLOGICAL-CHANGES OF THE SURFACE-STRUCTURE OF POLYMERS DUE TO EXCIMER LASER-RADIATION - A SYNERGETIC EFFECT [J].
BAHNERS, T ;
SCHOLLMEYER, E .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (04) :1884-1886
[5]   ORDERING OF MICROCRATERS PRODUCED BY A LASER ON A METAL SURFACE [J].
BASTOW, TJ .
NATURE, 1969, 222 (5198) :1058-&
[6]  
BAUERLE D, 1986, SPRINGER SERIES MATE, V1
[7]  
BUGAEV AA, 1988, ZH TEKH FIZ+, V58, P908
[8]  
CELLIS JP, 1992, APPL SURF SCI, V54, P322
[9]  
CIESLAK MJ, 1989, MRS BULL, V14, P32
[10]   ULTRAVIOLET-LASER-INDUCED PERIODIC SURFACE-STRUCTURES [J].
CLARK, SE ;
EMMONY, DC .
PHYSICAL REVIEW B, 1989, 40 (04) :2031-2041