OXYGEN-ION-ASSISTED DEPOSITION OF THIN GOLD-FILMS

被引：15

作者：

MARTIN, PJ ^{[1
]}

SAINTY, WG ^{[1
]}

NETTERFIELD, RP ^{[1
]}

BUCKLEY, AN ^{[1
]}

机构：

[1] CSIRO,DIV FOSSIL FUELS,SYDNEY 2112,AUSTRALIA

来源：

VACUUM | 1985年 / 35卷 / 12期

关键词：

D O I：

10.1016/0042-207X(85)90325-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

GOLD AND ALLOYS

引用

页码：621 / 624

页数：4

共 17 条

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[4]

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[8] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J].

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NETTERFIELD, RP ;

SAINTY, WG .

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[10]

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