DC MAGNETRON-SPUTTERED AND DIODE-SPUTTERED POLYCRYSTALLINE FE AND AMORPHOUS TB(FECO) FILMS - MORPHOLOGY AND MAGNETIC-PROPERTIES

被引：26

作者：

HONG, M

GYORGY, EM

VANDOVER, RB

NAKAHARA, S

BACON, DD

GALLAGHER, PK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 02期

关键词：

D O I：

10.1063/1.336667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：551 / 556

页数：6

共 11 条

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[3] AGING EFFECTS ON AMORPHOUS TB-TRANSITION-METAL FILMS PREPARED BY DIODE AND MAGNETRON SPUTTERING [J].

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GYORGY, EM ;

DILLON, JF ;

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JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3900-3902

[4] PERPENDICULAR ANISOTROPY OF BIAS-SPUTTERED GDCO FILM [J].

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JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :2338-2340

[5] MICROSTRUCTURE AND MAGNETISM IN AMORPHOUS RARE-EARTH-TRANSITION-METAL THIN-FILMS .1. MICROSTRUCTURE [J].

LEAMY, HJ ;

DIRKS, AG .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (06) :3430-3438

[6] KINETICS FOR CHANGES IN ANISOTROPY, COERCIVITY, AND ARGON CONTENT OF TRANSITION METAL RARE EARTH FILMS [J].

LUBORSKY, FE .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3592-3594

[7]

THEUERER HC, 1963, J APPL PHYS, V35, P554

[8]

Thornton J. A., 1978, THIN FILM PROCESSES

[9] INTRINSIC ANISOTROPY OF TB-FE FILMS PREPARED BY MAGNETRON CO SPUTTERING [J].

VANDOVER, RB ;

HONG, M ;

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DILLON, JF ;

ALBISTON, SD .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :3897-3899

[10]

VANDOVER RB, UNPUB

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