EXPOSURE STRATEGIES FOR POLYMETHYL METHACRYLATE FROM IN-SITU X-RAY-ABSORPTION NEAR-EDGE STRUCTURE SPECTROSCOPY

被引:66
作者
ZHANG, X
JACOBSEN, C
LINDAAS, S
WILLIAMS, S
机构
[1] State Univ of New York at Stony, Brook, Stony Brook
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 04期
关键词
D O I
10.1116/1.588175
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have observed the chemical changes in PMMA irradiated by x rays in situ. The chemical changes are monitored by micro-x-ray absorption near edge structure spectra at the carbon absorption edge. The loss of the ester group (C=O) and formation of C=C bonds have been determined quantitatively from changes in the intensities of the respective pi* resonant peaks as a function of dose. Samples prepared under different conditions were examined. From the dose dependence of bond formation, scission and linking, the performance of the resist can be predicted, so that the preparation strategy, dose, and development can be optimized. (C) 1995 American Vacuum Society.
引用
收藏
页码:1477 / 1483
页数:7
相关论文
empty
未找到相关数据