SIMULATION OF GEOMETRICAL CHANGE EFFECTS ON ELECTRICAL CHARACTERISTICS OF MICROMETER-SIZE VACUUM TRIODE WITH FIELD EMITTERS

Change in electrical characteristic of a micro-vacuum triode with a field electron emitter, due to change in physical dimension which may appear in the fabrication process, has been simulated. It has been found that the variation of the grid opening size more strongly affects the electrical characteristics of the triodes than the misalignment between the emitter tip and center of the grid opening. It has also been found, however, that such effect can be minimized by biasing the grid at a proper voltage. Effects of grid position relative to the emitter tip have been also investigated in order to find better device geometry for high-frequency application.