L-SHELL IONIZATION OF SI, P, S, CL, AND AR BY 0.4-MEV TO 2.0-MEV H+ AND 0.4-MEV TO 1.2-MEV H-2+ BOMBARDMENT

L-shell-ionization cross sections of Si, P, S, Cl, and Ar have been obtained for incident H+ energies of 0.4 to 2.0 MeV and for H2+ energies of 0.4 to 1.2 MeV. These relative cross sections were obtained from Auger-electron yields measured from gaseous targets of SiH4, PH3, SO2, CH3Cl, and Ar. The normalized experimental L-shell-ionization cross sections are compared to existing experimental L-shell-ionization cross sections and to various theoretical predictions. © 1990 The American Physical Society.