COMPARISON BETWEEN EXPERIMENTAL AND THEORETICAL ROCKING CURVES IN EXTREMELY ASYMMETRIC BRAGG CASES OF X-RAY-DIFFRACTION

被引:18
作者
KIMURA, S
HARADA, J
ISHIKAWA, T
机构
[1] NEC CORP LTD,MICROELECTR RES LAB,TSUKUBA,IBARAKI 305,JAPAN
[2] UNIV TOKYO,DEPT APPL PHYS,BUNKYO KU,TOKYO 113,JAPAN
来源
ACTA CRYSTALLOGRAPHICA SECTION A | 1994年 / 50卷
关键词
D O I
10.1107/S0108767393011535
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Double-crystal rocking curves from a highly perfect silicon crystal were taken in extremely asymmetric schemes, in which the glancing angles of the incident X-rays were very close to the critical angle of total external reflection. The experimental rocking curves were compared with theoretical calculations based both on an ordinary dynamical theory of diffraction and also on an extended dynamical theory, which uses a more exact solution of the fundamental equation of the dynamical theory and takes the effect of specular reflection into account. It is demonstrated from such a comparison that. in the case of extremely asymmetric diffraction, the ordinary treatment of the dynamical theory of diffraction is not valid; in contrast, the extended theory explains the rocking curve very well.
引用
收藏
页码:337 / 342
页数:6
相关论文
共 21 条
[1]   A MODIFIED DYNAMIC THEORY (MDT) OF X-RAY-DIFFRACTION IN EXTREMELY ASYMMETRIC SCHEMES [J].
AFANASEV, AM ;
MELIKYAN, OG .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 122 (02) :459-468
[2]   X-RAY-DIFFRACTION IN AN EXTREMELY ASYMMETRIC CASE [J].
BEDYNSKA, T .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 19 (01) :365-372
[3]   EFFECT OF TOTAL REFLECTION ON X-RAY-DIFFRACTION IN STRONGLY ASYMMETRIC BRAGG CASE [J].
BRUMMER, O ;
HOCHE, HR ;
NIEBER, J .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 33 (02) :587-593
[4]  
BRUMMER O, 1976, PHYS STATUS SOLIDI A, V37, P529, DOI 10.1002/pssa.2210370222
[5]   DIFFUSE SCATTERING FROM DEFECT CLUSTERS NEAR BRAGG REFLECTIONS [J].
DEDERICHS, PH .
PHYSICAL REVIEW B-SOLID STATE, 1971, 4 (04) :1041-+
[6]  
HASEGAWA E, 1993, 1993 INT C SOL STAT, P86
[7]   HIGH-PRECISION GONIOMETER SYSTEM FOR TOPOGRAPHY AND DIFFRACTOMETRY USING MULTIPLE CRYSTAL ARRANGEMENT [J].
ISHIKAWA, T ;
MATSUI, J ;
KITANO, T .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :613-616
[8]   STATISTICAL DYNAMICAL THEORY OF CRYSTAL DIFFRACTION .2. INTENSITY DISTRIBUTION AND INTEGRATED INTENSITY IN THE LAUE CASES [J].
KATO, N .
ACTA CRYSTALLOGRAPHICA SECTION A, 1980, 36 (SEP) :770-778
[9]   STATISTICAL DYNAMICAL THEORY OF CRYSTAL DIFFRACTION .1. GENERAL FORMULATION [J].
KATO, N .
ACTA CRYSTALLOGRAPHICA SECTION A, 1980, 36 (SEP) :763-769
[10]   EFFECT OF IMPURITIES ON DIFFRACTION CURVES OF X-RAYS FROM DISLOCATION-FREE SILICON CRYSTALS [J].
KIKUTA, S ;
KOHRA, K .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1966, 21 (07) :1449-&