NEW OXYGEN-INDUCED RECOMBINATION CENTERS 600-DEGREES-C TO 800-DEGREES-C HEAT-TREATED SILICON

被引:5
作者
BORIMSKII, VV
GLINCHUK, KD
LITOVCHENKO, NM
SALNIC, ZA
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 84卷 / 01期
关键词
D O I
10.1002/pssa.2210840130
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:237 / 241
页数:5
相关论文
共 7 条
[1]   INVESTIGATION OF FORMATION CONDITIONS OF THERMAL DONOR-I AND DONOR-II IN OXYGEN-CONTAINING N-TYPE SILICON WITHIN THE TEMPERATURE-RANGE 400-DEGREES-C TO 800-DEGREES-C [J].
BARANSKII, PI ;
BABICH, VM ;
BARAN, NP ;
DOTSENKO, YP ;
KOVALCHUK, VB ;
SHERSHEL, VA .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 78 (02) :733-739
[2]   ANNEALING BEHAVIOR OF OXYGEN-INDUCED RECOMBINATION CENTERS IN SILICON [J].
BORIMSKII, VV ;
GLINCHUK, KD ;
LITOVCHENKO, NM ;
SALNIK, ZA .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 80 (01) :343-348
[3]  
CASCARRA V, 1980, J APPL PHYS, V51, P4206
[4]   STRUCTURE AND FORMATION KINETICS OF OXYGEN-INDUCED RECOMBINATION CENTERS IN HEAT-TREATED SILICON [J].
GLINCHUK, KD ;
LITOVCHENKO, NM ;
SALNIK, ZA .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 71 (01) :83-87
[5]   DECAY OF EXCESS CARRIERS IN THERMALLY TREATED OXYGEN-DOPED SILICON [J].
GLINCHUK, KD ;
LITOVCHENKO, NM .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 58 (02) :549-555
[6]   ON THE EFFECT OF AMBIENTS ON THE FORMATION OF OXYGEN-RELATED DONORS IN CZ-SI [J].
SCHMALZ, K ;
GAWORZEWSKI, P .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 78 (02) :K141-K145
[7]  
SCHMALZ K, 1983, PHYS ST SOL A, V77, P571