THE NONLINEAR EFFECTS IN SPUTTERING OF SOLIDS DUE TO STRAGGLING OF ENERGY-LOSS

被引：8

作者：

BITENSKY, IS

机构：

[1] Division of Ion Physics, Department of Radiation Sciences, Uppsala University, S-75121 Uppsala

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 88卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(94)96082-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The nonlinear effects in sputtering under atomic and molecular ion bombardment are considered taking into account the straggling of primary ion energy deposition near the solid surface. Such consideration is necessary when the mean value of stopping power is not sufficient for a treatment of the spike effects. It is shown that the sputtering yield from a spike region, especially in the case of low energy deposition is not determined by the energy loss alone. The results of the calculations are compared with the experimental data on sputtering of solids under molecule bombardment.

引用

页码：69 / 73

页数：5

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