SELF-ALIGNED BOTTOM-GATE SUBMICROMETER-CHANNEL-LENGTH A-SI-H THIN-FILM TRANSISTORS

被引：26

作者：

BUSTA, HH

POGEMILLER, JE

STANDLEY, RW

MACKENZIE, KD

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1989年 / 36卷 / 12期

关键词：

D O I：

10.1109/16.40950

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2883 / 2888

页数：6

共 18 条

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