INFRARED-ABSORPTION SPECTROSCOPIC STUDY OF BETA-SIALONS IN THE SYSTEM SI3N4-AL2O3-ALN

被引：23

作者：

TAKASE, A

UMEBAYASHI, S

KISHI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 10期

关键词：

D O I：

10.1143/JJAP.21.1447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1447 / 1450

页数：4

共 16 条

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