UNITY YIELD CONDITIONS FOR SPUTTERING OF GRAPHITE BY CARBON-IONS

被引:42
作者
ROTH, J
BOHDANSKY, J
OTTENBERGER, W
机构
关键词
D O I
10.1016/0022-3115(89)90194-3
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:193 / 198
页数:6
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