EVALUATION OF A MULTIPLE GAS-MIXTURE WITH A SIMPLE MOSFET GAS SENSOR ARRAY AND PATTERN-RECOGNITION

The properties of a gas sensor array can be improved by the use of pattern recognition (PARC) methods. A gas sensor array with three pairs of Pd-gate MOSFETs and Pt-gate MOSFETs is exposed to a multiple-component gas mixture. Each pair is operated at a different temperature. The signals from the six sensors are analysed with both linear and nonlinear PLS (partial least square) models. The calculations of the PLS models are based on sensor signals obtained from calibration experiments. By means of combining a pattern recognition method with a semiconductor-based gas sensor array, we show that hydrogen concentrations can be predicted well in the presence of three other interfering gases. © 1990.