A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE

被引:77
作者
KOKUBUN, K
HIRATA, M
MURAKAMI, H
TODA, Y
ONO, M
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D O I
10.1016/0042-207X(84)90318-X
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:731 / 735
页数:5
相关论文
共 6 条
  • [1] BRIGGS WE, 1954, 1ST T NATN VAC S, P3
  • [2] DEVELOPMENT OF FRICTION TYPE VACUUM GAUGES
    DRAWIN, HW
    [J]. VACUUM, 1965, 15 (03) : 99 - &
  • [3] Theory and use of the molecular gauge
    Dushman, S
    [J]. PHYSICAL REVIEW, 1915, 5 (03): : 212 - 229
  • [4] HIRATA M, 1983, J VAC SOC JPN, V26, P526
  • [5] LANDAU LD, 1959, FLUID MECHANICS, pCH2
  • [6] LANDAU LD, 1959, FLUID MECHANICS, pCH8