NITRIDING OF TITANIUM IN AN RF DISCHARGE .2. EFFECT OF THE ADDITION OF HYDROGEN TO NITROGEN ON NITRIDING

被引：43

作者：

MATSUMOTO, O

KONUMA, M

KANZAKI, Y

机构：

来源：

JOURNAL OF THE LESS-COMMON METALS | 1982年 / 84卷 / 01期

关键词：

D O I：

10.1016/0022-5088(82)90141-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：157 / 163

页数：7

共 12 条

[1] SPECTROSCOPIC INVESTIGATIONS OF HIGH-CURRENT HOLLOW-CATHODE DISCHARGES IN FLOWING NITROGEN AT LOW PRESSURES [J].

BLEEKRODE, R ;

VANBENTH.W .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (13) :5274-+

[2] SPECTROSCOPIC DIAGNOSTICS OF RF DISCHARGES AT MODERATE PRESSURE AND CHEMICAL APPLICATIONS .1. PURE NITROGEN [J].

CRAMAROSSA, F ;

FERRARO, G ;

MOLINARI, E .

JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1974, 14 (06) :419-436

[3] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].

DEAL, BE ;

GROVE, AS .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&

[4]

HELLUND EJ, 1961, PLASMA STATE, P91

[5] NITROGEN 1S ELECTRON BINDING ENERGIES . CORRELATIONS WITH MOLECULAR ORBITAL CALCULATED NITROGEN CHARGES [J].

HENDRICKSON, DN ;

HOLLANDER, JM ;

JOLLY, WL .

INORGANIC CHEMISTRY, 1969, 8 (12) :2642-+

[6]

HUDIS M, 1973, J APPL PHYS, V44, P1480

[7] NITRIDING OF TITANIUM IN A RADIO-FREQUENCY DISCHARGE [J].

KONUMA, M ;

MATSUMOTO, O .

JOURNAL OF THE LESS-COMMON METALS, 1977, 52 (01) :145-152

[8] NITRIDING OF ZIRCONIUM IN A RADIO-FREQUENCY DISCHARGE [J].

KONUMA, M ;

MATSUMOTO, O .

JOURNAL OF THE LESS-COMMON METALS, 1977, 55 (01) :97-102

[9] NITRIDING OF STEEL IN A RADIO-FREQUENCY DISCHARGE [J].

KONUMA, M ;

KANZAKI, Y ;

MATSUMOTO, O .

DENKI KAGAKU, 1979, 47 (10) :597-601

[10] INTERACTION BETWEEN HYDROGEN PLASMA AND NITRIFIED METALS [J].

MATSUMOTO, O ;

YAKURA, S ;

KANZAKI, Y .

DENKI KAGAKU, 1982, 50 (02) :189-190

← 1 2 →