RETENTION OF HYDROGEN IMPLANTED INTO SIC SINGLE-CRYSTALS

被引:23
作者
NAGATA, S
YAMAGUCHI, S
FUJINO, Y
HIRABAYASHI, M
KAMADA, K
机构
[1] TOHOKU UNIV,IRON STEEL & OTHER MET RES INST,SENDAI,MIYAGI 980,JAPAN
[2] NAGOYA UNIV,INST PLASMA PHYS,NAGOYA,AICHI 464,JAPAN
关键词
D O I
10.1016/0022-3115(84)90453-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:760 / 763
页数:4
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