GRATINGS FOR METROLOGY AND PROCESS-CONTROL .1. A SIMPLE PARAMETER OPTIMIZATION PROBLEM

被引：13

作者：

MENDES, GF

CESCATO, L

FREJLICH, J

机构：

来源：

APPLIED OPTICS | 1984年 / 23卷 / 04期

关键词：

D O I：

10.1364/AO.23.000571

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：571 / 575

页数：5

共 12 条

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[J]. APPLIED OPTICS, 1976, 15 (12): : 2937 - 2939
[10] DIFFRACTION ANALYSIS OF DIELECTRIC SURFACE-RELIEF GRATINGS
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GAYLORD, TK
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1982, 72 (10) : 1385 - 1392