FERROELECTRIC THIN-FILM CHARACTERIZATION USING SUPERCONDUCTING MICROSTRIP RESONATORS

被引：57

作者：

GALT, D ^{[1
]}

PRICE, JC ^{[1
]}

BEALL, JA ^{[1
]}

HARVEY, TE ^{[1
]}

机构：

[1] NATL INST STAND & TECHNOL, DIV ELECTROMAGNET TECHNOL, BOULDER, CO 80309 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1109/77.403116

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a novel technique for characterizing the dielectric response of ferroelectric thin films at microwave frequencies. The method involves a microstrip resonator which incorporates a ferroelectric capacitor at its center. To demonstrate this method we have fabricated a superconducting microstrip resonator from a laser-ablated YBa2Cu3O7-delta (YBCO) film on a LaAlO3 (LAO) substrate with a SrTiO3 (STO) capacitor at its center. We report the observed dielectric behavior of the STO laser ablated film as a function of bias at liquid He and N-2 temperatures and at high and low frequencies. It is observed that the electrically tunable dielectric constant of the STO film is roughly independent of frequency up to 20 GHz (especially at high bias). The loss tangent of the STO/LAO capacitor decreases with increasing bias and is apparently independent of frequency between 6 and 20 GHz.

引用

页码：2575 / 2578

页数：4

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