MONTE-CARLO SIMULATION OF SPUTTERING IN AU-CU ALLOYS-SIMULATION WITH FORMATION OF ALTERED LAYER INCLUDED

被引：21

作者：

KANG, HJ ^{[1
]}

SHIMIZU, R ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

SURFACE SCIENCE | 1986年 / 169卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(86)90615-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：337 / 346

页数：10

共 26 条

[1] MEASUREMENTS OF ANGULAR-DISTRIBUTIONS OF SPUTTERED MATERIAL AS A NEW TOOL FOR SURFACE-SEGREGATION STUDIES - SEGREGATION IN CUPT ALLOYS [J].

ANDERSEN, HH ;

CHERNYSH, V ;

STENUM, B ;

SORENSEN, T ;

WHITLOW, HJ .

SURFACE SCIENCE, 1982, 123 (01) :39-46

[2]

ANDERSEN W, 1974, KGL DANSKE VIDENSKAB, P39

[3] ENERGY-DISTRIBUTIONS OF NEUTRAL ATOMS AND MOLECULES SPUTTERED FROM POLYCRYSTALLINE SILVER [J].

BERNHARDT, F ;

OECHSNER, H ;

STUMPE, E .

NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :329-334

[4] ALLOY SPUTTERING [J].

BETZ, G .

SURFACE SCIENCE, 1980, 92 (01) :283-309

[5]

BETZ G, 1983, SPUTTERING PARTICLE, V2, P2

[6]

BETZ G, 1970, NEDERL TIJEDSCHRIFT, V8, P203

[7] COMPUTER-SIMULATION OF PREFERENTIAL SPUTTERING [J].

ECKSTEIN, W ;

MOLLER, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :727-734

[8]

FUKADA S, 1982, J NUCL MATER, V111, P1204

[9] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J].

GILLAM, E .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) :55-&

[10]

GSCHNEIDER KA, 1964, SOLID STATE PHYS, V16, P87

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