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A MICROMACHINED MASS-FLOW SENSOR WITH INTEGRATED ELECTRONICS ON GAAS

被引：11
作者：
FRICKE, K
机构：
[1] Technische Hochschule Darmstadt, Institut für Hochfrequenztechnik, D-64283 Darmstadt
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 45卷 / 02期
关键词：
GALLIUM ARSENIDE; INTEGRATED ELECTRONICS; MASS-FLOW SENSOR; MICROMACHINING;
D O I：
10.1016/0924-4247(94)0821X-H
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An integrated mass-flow sensor on GaAs based on the principle of convective heat transfer has been developed. An AlGaAs etch-stop layer is used for the fabrication of the membrane for thermal isolation of the heater. The temperature of the mesatype heating resistor is measured by cascaded thermopiles. A differential MESFET amplifier is integrated for on-chip amplification and impedance transformation. Measurements show that the mass-flow sensor can be used up to an ambient temperature of 300-degrees-C.
引用
收藏
页码：91 / 94
页数：4
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