RESIDUAL CURRENTS IN SEVERAL COMMERCIAL ULTRAHIGH-VACUUM BAYARD-ALPERT GAUGES

被引：7

作者：

FILIPPELLI, AR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.574845

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3234 / 3241

页数：8

共 27 条

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[5]

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HOBSON, JP ;

EARNSHAW, JW .

HOBSON, JP .

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[8] A THIN-COLLECTOR BAYARD-ALPERT GAUGE FOR 10-12 TORR VACUUM [J].

HSEUH, HC ;

LANNI, C .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :3244-3246

[9]

HULEK Z, 1977, 7TH P INT VAC C VIEN, P145

[10]

KANAJI T, 1977, 7TH P INT VAC C VIEN, P133