A SEMICONDUCTIVE HUMIDITY SENSOR

[1] ARAI H, 1984, J SURFACE SCI SOC JP, V5, P165

[2] FUKUSHIMA F, 1983, NAT TECH REP, V29, P450

[3] FUTATA H, 1986, Patent No. 33461

[4] FUTATA H, 1981, Patent No. 211378

[5] MILNES AG, 1980, SEMICONDUCTOR DEVICE, P933

[6] NORTON HN, 1982, SENSOR ANAL HDB, P204

[7] SEIYAMA T, 1982, Patent No. 186035

[1] ARAI H, 1984, J SURFACE SCI SOC JP, V5, P165

[2] FUKUSHIMA F, 1983, NAT TECH REP, V29, P450

[3] FUTATA H, 1986, Patent No. 33461

[4] FUTATA H, 1981, Patent No. 211378

[5] MILNES AG, 1980, SEMICONDUCTOR DEVICE, P933

[6] NORTON HN, 1982, SENSOR ANAL HDB, P204

[7] SEIYAMA T, 1982, Patent No. 186035