TRUE AUGER SPECTRAL SHAPES - A STEP TO STANDARD SPECTRA

被引:32
作者
GOTO, K
SAKAKIBARA, N
TAKEICHI, Y
NUMATA, Y
SAKAI, Y
机构
[1] NAGOYA INST TECHNOL,GOKISO CHO,SHOWA KU,NAGOYA,AICHI 466,JAPAN
[2] JEOL,TOKYO 196,JAPAN
关键词
D O I
10.1002/sia.740220119
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have developed a novel cylindrical mirror Auger electron analyzer with the well defined electric field of 0.1% and the residual magnetic field of less than 1 mG. The CMA has a coaxial electron gun and the entrance angles are 42.3-degrees +/- 6-degrees. The theoretically calculated energy resolution of 0.24% was obtained and the transmission was estimated to be 5.6%. This CMA can be used to obtain an absolute Auger electron yield with errors in peak heights of 5%, with an uncertainty in the energy position of 0.1 eV (or 0.01%), and with ghost intensities due to scattering of 0.1-0.2% for energies greater than 10 eV. Samples of polycrystalline gold, silver, and copper have been examined.
引用
收藏
页码:75 / 78
页数:4
相关论文
共 19 条
[1]   LMM AUGER-SPECTRA OF CU, ZN, GA, AND GE .2. RELATIONSHIP WITH L23 PHOTOELECTRON-SPECTRA VIA L2L3M45 COSTER-KRONIG PROCESS [J].
ANTONIDES, E ;
JANSE, EC ;
SAWATZKY, GA .
PHYSICAL REVIEW B, 1977, 15 (10) :4596-4601
[2]  
GOTO K, 1993, MICROBEAM ANAL, V2, P123
[3]  
GOTO K, 1988, K VAC SOC JPN, V31, P906
[4]  
GOTO K, UNPUB, P92401
[5]   COMPARISON OF SPHERICAL DEFLECTOR AND CYLINDRICAL MIRROR ANALYZERS [J].
HAFNER, H ;
SIMPSON, JA ;
KUYATT, CE .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (01) :33-&
[6]   MODEL-CALCULATIONS OF THE ELECTRON-OPTICAL PROPERTIES OF COMPACT FARADAY CUPS [J].
INGRAM, GD ;
SEAH, MP .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1989, 22 (04) :242-249
[7]   RESULTS OF A JOINT AUGER ESCA ROUND ROBIN SPONSORED BY ASTM-COMMITTEE-E-42-ON-SURFACE-ANALYSIS .2. AUGER RESULTS [J].
POWELL, CJ ;
ERICKSON, NE ;
MADEY, TE .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1982, 25 (2-3) :87-118
[8]   PRECISION, ACCURACY, AND UNCERTAINTY IN QUANTITATIVE SURFACE-ANALYSES BY AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY [J].
POWELL, CJ ;
SEAH, MP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :735-763
[9]   CRITERION FOR COMPARING ANALYZERS [J].
SAREL, HZ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (04) :561-&
[10]   CYLINDRICAL CAPACITOR AS AN ANALYZER .I. NONRELATIVISTIC PART [J].
SAREL, HZ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1967, 38 (09) :1210-&