WAVE-FORM ANALYSIS WITH OPTICAL MULTICHANNEL DETECTORS - APPLICATIONS FOR RAPID-SCAN SPECTROSCOPIC ELLIPSOMETRY

被引：46

作者：

AN, I ^{[1
]}

COLLINS, RW ^{[1
]}

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.1142390

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A unique rapid-scanning ellipsometer employing a rotating polarizer optical configuration and a multichannel detector for a 1.5-4.5 eV spectral range, has been developed recently for real time studies of film growth and surfaces. This is a new application of the photodiode array-based optical multichannel detector that entails waveform analysis of the incident irradiance at each photon energy. For accurate ellipsometric spectra {psi-(hv),DELTA-(hv)}, the raw data in the form of photon counts, integrated over four or more equal sectors of polarizer rotation, must be corrected for systematic errors originating from the detection system. Simple procedures are described to characterize and correct for the most significant errors including detection system nonlinearity, image persistence, and scattered stray light in the spectrograph/detector enclosure.

引用

页码：1904 / 1911

页数：8

共 8 条

[1]

Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6

[2] AUTOMATIC ROTATING ELEMENT ELLIPSOMETERS - CALIBRATION, OPERATION, AND REAL-TIME APPLICATIONS [J].